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Silicon-on-Insulator Based 2 x 2 Multimode Interference Coupler with Large Tolerance |
| WEI Hong-Zhen1;YU Jin-Zhong1;LIU Zhong-Li2;ZHANG Xiao-Feng1;SHI Wei3;FANG Chang-Shui3 |
| 1State Key Laboratory on Integrated Optoelectronics, and
2Microelectronics Center, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083
3State Key Laboratory of Crystal Materials, Shandong University, Ji’nan 250100 |
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| Cite this article: |
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WEI Hong-Zhen, YU Jin-Zhong, LIU Zhong-Li et al 2001 Chin. Phys. Lett. 18 245-247 |
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Abstract We demonstrate a type of 2 x 2 multimode interference 3 dB coupler based on silicon-on-insulator. The fabrication tolerance was investigated by the effective index method and the guide mode method. The devices with different lengths were fabricated and near-field output images were obtained. Tolerances to width, length and etch depth are 2, 200 and 2μm, respectively. The devices show a uniform power distribution.
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| Keywords:
42.82.Et
42.82.Cr
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Published: 01 February 2001
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| PACS: |
42.82.Et
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(Waveguides, couplers, and arrays)
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42.82.Cr
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(Fabrication techniques; lithography, pattern transfer)
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