Original Articles |
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Reflectivity of W/Si Multilayer at the Photoenergy of 700eV
and 1200eV |
FENG Shi-Meng;ZHU Guo-Long;SHAO Jian-Da;YI Kui;FAN Zheng-Xiu
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Shanghai Institute of Optics and Fine Mechanics, Chinese
Academy of Sciences P. O. Box 800-211, Shanghai 201800
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Cite this article: |
FENG Shi-Meng, ZHU Guo-Long, SHAO Jian-Da et al 2001 Chin. Phys. Lett. 18 1481-1482 |
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Abstract We have deposited W/Si multilayer mirrors using magnetron
sputtering, and measured their reflectivity at the Beijing synchrotron Radiation Facility. The W/Si multilayer mirrors show the peak reflectivity of approximately 10% at a photo-energy of 1200eV and 10.5% at a photo-energy of 700eV at the incidence angle of 81°. So far, no higher reflectivity than that given in this letter has been reported.
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Keywords:
42.79.Bh
68.65.+g
61.10.Eq
78.66.-w
81.15.Cd
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Published: 01 November 2001
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Abstract
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