Energy Filtering and Coaxial Detection of the Backscattered Electrons in Scanning Electron Microscope

Chin. Phys. Lett.

2000, Vol. 17

Issue (9): 637-639 DOI:

Original Articles

Energy Filtering and Coaxial Detection of the Backscattered Electrons in Scanning Electron Microscope

JIANG Chang-Zhong^1,2;P. Morin²;N. Rosenberg²

¹Department of Physics, Wuhan University, Wuhan 430072 ²Departement de Physique des Matériaux, Université Claude Bernard Lyon I, 69622 Villeurbanne Cedex, France

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JIANG Chang-Zhong, P. Morin, N. Rosenberg 2000 Chin. Phys. Lett. 17 637-639

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Abstract A new detection system in scanning electron microscope, which filters in energy and detects the backscattered electrons close to the microscope axis, is described. This technique ameliorates the dependence of the backscattering coefficient on atomic number, and suppresses effectively the relief contrast at the same time. Therefore this new method is very suitable to the composition analysis.

Keywords: 07.80.+x 61.16.Di

Published: 01 September 2000

PACS:	07.80.+x
	61.16.Di

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https://cpl.iphy.ac.cn/ OR https://cpl.iphy.ac.cn/Y2000/V17/I9/0637

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