Deposition of Diamond-Like Carbon Films with Femtosecond KrF Laser Pulses

Chin. Phys. Lett.

2000, Vol. 17

Issue (7): 540-541 DOI:

Original Articles

Deposition of Diamond-Like Carbon Films with Femtosecond KrF Laser Pulses

YAO Dong-Sheng^1,2;LIU Jing-Ru²;WANG Li-Ge²;YU Chang-Xuan¹;ZHAN Ru-Juan¹

¹Department of Modern Physics, University of Science and Technology of China, HeFei 230026 ²Third Division, Northwest Institute of Nuclear Technology, Xi’an 710024

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YAO Dong-Sheng, LIU Jing-Ru, WANG Li-Ge et al 2000 Chin. Phys. Lett. 17 540-541

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Abstract Hydrogen-free diamond-like carbon (DLC) films with the optical band gaps of 2.0-2.7eV and the microhardness of 40-55 GPa are deposited by femtosecond KrF laser pulses. The film microstructure of nanometer spheroid is observed. The film microhardness is improved with the increase of ion kinetic energy of plasma plume from 300 to 600eV. The characteristics of DLC film deposition with fs pulses is discussed.

Keywords: 85.15.Fg 78.66.-w

Published: 01 July 2000

PACS:	85.15.Fg
	78.66.-w	(Optical properties of specific thin films)

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https://cpl.iphy.ac.cn/ OR https://cpl.iphy.ac.cn/Y2000/V17/I7/0540

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	YAO Dong-Sheng
	LIU Jing-Ru
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	ZHAN Ru-Juan

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