High Resolution Elastic Recoil Detection Analysis with Q3D Magnetic Spectrometer

Chin. Phys. Lett.

1999, Vol. 16

Issue (7): 493-495 DOI:

Original Articles

High Resolution Elastic Recoil Detection Analysis with Q3D Magnetic Spectrometer

LU Xiu-qin;FU Chang-bo;LIANG Gang;GUO Ji-Yu;ZHAO Kui;LI Shu-yuan;LIU Jian-cheng;JIANG Hua;YANG Bing-fan

Department of Nuclear Physics, China Institute of Atomic Energy, Beijing 102413

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LU Xiu-qin, FU Chang-bo, LIANG Gang et al 1999 Chin. Phys. Lett. 16 493-495

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Abstract Elastic recoil detection analysis technique with ΔE - E particle identification and Q3D momentum analysis has been developed to determine high resolution depth profiles in thin foils and multilayer systems. A depth resolution of 1.2nm was achieved at the surface of the samples using a high quality 100MeV ¹²⁷I beam. The method was applied to depth profile analysis of C/LiF multilayers, superconductor and GaN foil samples.

Keywords: 25.70.Bc 29.30.Ep 68.55.Ln

Published: 01 July 1999

PACS:	25.70.Bc	(Elastic and quasielastic scattering)
	29.30.Ep	(Charged-particle spectroscopy)
	68.55.Ln	(Defects and impurities: doping, implantation, distribution, concentration, etc.)

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https://cpl.iphy.ac.cn/ OR https://cpl.iphy.ac.cn/Y1999/V16/I7/0493

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	LU Xiu-qin
	FU Chang-bo
	LIANG Gang
	GUO Ji-Yu
	ZHAO Kui
	LI Shu-yuan
	LIU Jian-cheng
	JIANG Hua
	YANG Bing-fan

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