Preparation of TiOx/γ-AI2O3 Catalyst on Powdery γ-AI2O3 by Using Reactive Sputtering Deposition

Chin. Phys. Lett.

1999, Vol. 16

Issue (6): 426-427 DOI:

Original Articles

Preparation of TiO_x/γ-AI₂O₃ Catalyst on Powdery γ-AI₂O₃ by Using Reactive Sputtering Deposition

LU Wen-qi¹;XU Zhen-feng²;DENG Xin-lu¹;XU Jun¹;ZHANG Jia-liang¹;ZHU Ai-min¹;GONG Wei-min¹

¹State Key Laboratory for Material Modification by Laser, Ion and Electron Beams, Dalian University of Technology, Dalian 116024 ²Dandong Textile College, Dandong 118003

Cite this article:

LU Wen-qi, XU Zhen-feng, DENG Xin-lu et al 1999 Chin. Phys. Lett. 16 426-427

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Abstract A layer of TiO_x was deposited on powdery γ-AI₂O₃ by using flat-target magnetron sputtering in microwave electron cyclotron resonance plasma. A vibrator was developed to coat the γ-AI₂O₃ particles evenly by TiO_x. The conversion efficiency of methane and both the yield and the selectivity of C₂ hydrocarbons and C₂H₂ were revealed to be superior to that by conventional chemical method. The use of vibrator is effective.

Keywords: 52.75.Rx

Published: 01 June 1999

PACS:

52.75.Rx

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https://cpl.iphy.ac.cn/ OR https://cpl.iphy.ac.cn/Y1999/V16/I6/0426

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	LU Wen-qi
	XU Zhen-feng
	DENG Xin-lu
	XU Jun
	ZHANG Jia-liang
	ZHU Ai-min
	GONG Wei-min

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