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Preparation of the Bilayer Film Electret of SiO2 Matrix Amorphous Composite |
| HUANG Zhi-qiang;XU Zheng |
| Institute of Microelectronic Materials, School of Materials Science & Engineering, Tongji University, Shanghai 200092 |
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| Cite this article: |
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HUANG Zhi-qiang, XU Zheng 1999 Chin. Phys. Lett. 16 911-913 |
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Abstract Through the fusing and the thermal oxidation technology, the bilayer compound film (SiO2-PbO-Al2O3)/SiO2 electret was successfully prepared on the single crystalline silicon substrate. Experiments indicated that this co-mixture laminated-layer compound film possessed unique excellent electret properties. Without any chemical modification, the surface electric potential of the sample could get the equal value of the grid voltage after corona charging and decayed no more than 5% in 270d. Moreover, not only did the samples have the excellent capability of negative charges injection and storage, but also did they have the outstanding positive ones. Thermally stimulated discharge current spectra showed that the compound film had unique, single but stable charge-trapped mechanism corresponding to T = 290°C positive/negative discharge current peak, which could be attributed to its special inner microstructure.
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| Keywords:
61.40.+b
77.90.+k
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Published: 01 December 1999
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| PACS: |
61.40.+b
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77.90.+k
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(Other topics in dielectrics, piezoelectrics, and ferroelectrics and their properties)
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