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Dependence of Secondary Ion Mass Spectrometry Relative Sensitivity Factor on Matrix |
| YANG De-quan;FAN Chui-zhen |
| Laboratory of Applied Surface Physics, Lanzhou Institute of Physics, Chinese Academy of Space Technology, Lanzhou 730000 |
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| Cite this article: |
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YANG De-quan, FAN Chui-zhen 1998 Chin. Phys. Lett. 15 697-699 |
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Abstract In secondary ion mass spectrometry, we define the slope of logarithm of relative sensitivity factor versus ionization potential as matrix effect factor. It was found that the matrix effect factor is dependent on the average atomic number and average electronegative values, as well as average oxide formation heat of matrix. The "combined local thermal equilibrium model and bond-breaking'' model proposed by us early was used to explain this dependence.
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| Keywords:
82.80.Ms
78.30.Am
79.20.Rf
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Published: 01 September 1998
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| PACS: |
82.80.Ms
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(Mass spectrometry (including SIMS, multiphoton ionization and resonance ionization mass spectrometry, MALDI))
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78.30.Am
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(Elemental semiconductors and insulators)
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79.20.Rf
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(Atomic, molecular, and ion beam impact and interactions with surfaces)
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