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Effect of the Compressive Stress for the Growth of Cubic-BN Film |
| ZHAO Yong-nian1,2;ZOU Guang-tian1;HE Zhi1;ZHAO Bing2;WANG Bo1 |
| 1State Key Laboratory for Superhard Materials, Jilin University, Changchun 130023
2Key Laboratory for Supramolecular Structure and Spectroscopy, Jilin University, Changchun 130023
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| Cite this article: |
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ZHAO Yong-nian, ZOU Guang-tian, HE Zhi et al 1998 Chin. Phys. Lett. 15 615-616 |
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Abstract In this work, it is found that the compressive stress on the surface of cubic-BN (c-BN) film is all smaller than that inside c-BN film and after a longer period, the depositing matter mainly is of hexagonal-BN phase rather than c-BN phase, those just are the reason why a pure thicker c-BN film cannot, as yet, be obtained. Up to now the lowest IR peak position of 1004.7cm-1 detected from a broken and part delaminated c-BN film may be one close to the stressless c-BN.
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| Keywords:
81.15.Jj
81.15.Np
52.80.Vp
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Published: 01 August 1998
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| PACS: |
81.15.Jj
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(Ion and electron beam-assisted deposition; ion plating)
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81.15.Np
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(Solid phase epitaxy; growth from solid phases)
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52.80.Vp
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(Discharge in vacuum)
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