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Parameter Estimation of a Spherical Top Inductively Coupled Plasma Source with Global Model |
| WU Hanming;LI Ming;CHEN Yunming;WU Chengkang |
| Institute of Mechanics, Academia Sinica, Beijing 100080 |
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| Cite this article: |
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WU Hanming, LI Ming, CHEN Yunming et al 1995 Chin. Phys. Lett. 12 281-284 |
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Abstract Using spatially averaged global model, we succeed in obtaining some plasma parameters for a low pressure inductively coupled plasma source of our laboratory. As far as the global balance is concerned, the models can give reasonable results of the parameters, such as the global electron temperature and the ion impacting energy, etc. It is found that the ion flow is hardly affected by the neutral gas pressure. Finally, the magnetic effects are calculated by means of the method. The magnetic field can play an important role to increase plasma density and ion current.
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| Keywords:
52.65.+z
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Published: 01 May 1995
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