Influence of Rapid Thermal Annealing on Structural and Interfacial Properties of Lead-Zirconate-Titanate Thin Films Prepared by Excimer Laser Deposition

Chin. Phys. Lett.

1994, Vol. 11

Issue (8): 518-521 DOI:

Original Articles

Influence of Rapid Thermal Annealing on Structural and Interfacial Properties of Lead-Zirconate-Titanate Thin Films Prepared by Excimer Laser Deposition

ZHENG Lirong;CHEN Yiqing;LIN Chenglu;ZOU Shichang

State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Metallurgy, Academia Sinica, Shanghai 200050

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ZHENG Lirong, CHEN Yiqing, LIN Chenglu et al 1994 Chin. Phys. Lett. 11 518-521

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Abstract Lead zirconate titanate thin films were prepared by pulsed excimer laser deposition on silicon substrates. Rapid thermal annealing was used to improve its properties. Structural and interfacial characteristics of the films before and after annealing were investigated by x-ray diffraction, Rutherford backscattering spectrometry and automatic spreading resistance.

Keywords: 77.80.-e 68.35.Fx 42.55.Gp

Published: 01 August 1994

PACS:	77.80.-e	(Ferroelectricity and antiferroelectricity)
	68.35.Fx	(Diffusion; interface formation)
	42.55.Gp

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https://cpl.iphy.ac.cn/ OR https://cpl.iphy.ac.cn/Y1994/V11/I8/0518

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