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Ar Ion Implantation Induced Tc Degradation of YBa2Cu3O7-x Thin Films |
LI Yijie;REN Congxin;CHEN Guoliang;LIN Zixin;ZOU Shichang |
Ion Beam Laboratory, Shanghai Institute of Metallurgy, Academia Sinica, Shanghai 200050 |
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Cite this article: |
LI Yijie, REN Congxin, CHEN Guoliang et al 1991 Chin. Phys. Lett. 8 157-160 |
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Abstract The Ar ion implantation induced changes of structure and transport properties of YBa2Cu3O7-x thin films were studied as a function of fluence. Both the zero resistance temperature Tc and the critical current density Jc decrease rapidly with fluence, however, the transition temperature onset almost remains constant at low fluences. At dose of 1.2x1013Ar/cm2, the sample has a metal to semiconductor phase transition. When the fluence further increases, a crystalline to amorphous phase transition occurs, and the sample becomes insulator.
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Keywords:
74.60.Mj
74.65.+n
74.75.+t
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Published: 01 March 1991
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