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EFFECT OF H+-IONS IMPLANTATION AND Ar+-IONS BOMBARDMENT ON THE PROPERTIES OF LiNbO3 CRYSTAL SURFACES |
FENG Xiqi;SHANG Wei |
Shanghai Institute of Ceramics, Academia Sinica, Shanghai |
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Cite this article: |
FENG Xiqi, SHANG Wei 1989 Chin. Phys. Lett. 6 72-75 |
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Abstract The H+-ions implantation and Ar+-ions bombardment did not cause near-surface decomposition of LiNbO3, but it resulted in the alteration of the physical properties. The XPS (x-ray photoelectron energy spectroscopy) measurement was used to characterize the properties of the radiation damaged surface layer of LiNbO3.
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Keywords:
68.551n
78.70G
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Published: 01 February 1989
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