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INFLUENCE OF SUBSTRATE TEMPERATURE ON THE STRUCTURE OF SPUTTERED a-Si1-xSnx:H ALLOYS |
| ZHANG Fangqing;HE Deyan;CHEN Guanghua |
| Department of Physics, Lanrhou University, Lanzhou |
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| Cite this article: |
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ZHANG Fangqing, HE Deyan, CHEN Guanghua 1986 Chin. Phys. Lett. 3 245-248 |
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Abstract X-ray diffraction, SEM and XPS were used to detect the structure of sputtered a-Si1-xSnx:H alloys. It is verified that the types of Sn site in the alloys depend on substrate temperature Ts. Most of the Sn atoms are substituted for Si at Ts 220°C, whereas a larger fraction of β-Sn clusters are formed at Ts 220°C.
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Published: 01 June 1986
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