| CROSS-DISCIPLINARY PHYSICS AND RELATED AREAS OF SCIENCE AND TECHNOLOGY |
|
|
|
|
An Array Consisting of 10 High-Speed Side-Illuminated Evanescently Coupled Waveguide Photodetectors Each with a Bandwidth of 20 GHz |
| LV Qian-Qian, YE Han, YIN Dong-Dong, YANG Xiao-Hong, HAN Qin** |
State Key Laboratory of Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083
|
|
| Cite this article: |
|
LV Qian-Qian, YE Han, YIN Dong-Dong et al 2015 Chin. Phys. Lett. 32 128503 |
|
|
|
|
Abstract We design and fabricate a parallel system with 10 high speed side-illuminated evanescently coupled waveguide photodetectors (ECPDs). The 10 ECPDs exhibit a uniform 3 dB bandwidth of 20 GHz and low dark current of about 1 nA at 2 V reverse bias. The 10 ECPDs also exhibit uniform photo-responsivity of about 0.23 A/W with an active region of 5×25 μm2. The photodetector array has a total bandwidth of more than 200 GHz and can be integrated with other optoelectronic devices.
|
|
|
Received: 02 July 2015
Published: 05 January 2016
|
|
| PACS: |
85.60.Gz
|
(Photodetectors (including infrared and CCD detectors))
|
| |
73.40.Kp
|
(III-V semiconductor-to-semiconductor contacts, p-n junctions, and heterojunctions)
|
| |
81.15.Hi
|
(Molecular, atomic, ion, and chemical beam epitaxy)
|
|
|
|
|
|
[1] Binetti P R A, Leijtens X J M, Vries T de, Oei Y S, Cioccio L Di, Fedeli J M, Lagahe C, Campenhout J Van, Thourhout D Van, Veldhoven P J van, N?tzel R and Smit M K 2010 IEEE Photon. J. 2 299
[2] Park H, Fang A W, Kodama S and Bowers J E 2005 Opt. Express 13 9460
[3] Piels M, Bauters J F, Davenport M L, Heck M J R and Bowers J E 2014 J. Lightwave Technol. 32 817
[4] Li C, Xue C L, Liu Z, Cheng B W and Wang Q M 2014 Chin. Phys. B 23 038507
[5] Zhang X L, Liu S T, Lu D, Zhang R K and Ji C 2015 Chin. Phys. Lett. 32 054202
[6] Nagarajan R, Joyner C H, Schneider R P et al 2005 IEEE J. Sel. Top. Quantum Electron. 11 50
[7] Liu S Q, Han Q, Zhu B, Yang X H, Ni H Q, He J F, Wang X and Niu Z C 2012 Chin. Phys. Lett. 29 038501
[8] Pan P, An J M, Wang H J, Wang Y, Zhang J S, Wang L L, Dai H Q and Zhang X G 2014 Chin. Phys. B 23 044210
[9] Demiguel S, Li N, Li X W, Zheng X G, Kim J, Campbell J C, Lu H F and Anselm A 2003 IEEE Photon. Technol. Lett. 15 1761
[10] Liu S Q, Yang X H, Liu Y, Li B and Han Q 2013 Chin. Phys. B 22 108503
[11] Giraudet L, Banfi F, Demiguel S and Hervé-Gruyer G 1999 IEEE Photon. Technol. Lett. 11 111 |
|
Viewed |
|
|
|
Full text
|
|
|
|
|
Abstract
|
|
|
|
|
