| CONDENSED MATTER: ELECTRONIC STRUCTURE, ELECTRICAL, MAGNETIC, AND OPTICAL PROPERTIES |
|
|
|
|
Sub-wavelength Ripple Formation on Silicon Induced by Femtosecond Laser Radiation |
| ZHOU Ming, YUAN Dong-Qing, ZHANG Wei, SHEN Jian, LI Bao-Jia, SONG Juan, CAI Lan |
| Center for Photo Manufacturing Science and Technology, Jiangsu University, Zhenjiang 212013 |
|
| Cite this article: |
|
ZHOU Ming, YUAN Dong-Qing, ZHANG Wei et al 2009 Chin. Phys. Lett. 26 037901 |
|
|
|
|
Abstract Periodic microstructures on silicon bulk are formed by the irradiation of the femtosecond laser with the laser wavelength of 800nm and the pulse length of 130fs. We investigate the surface periodic ripple structures produced by femtosecond laser treatment. The effects of feedrate of sample, v, on laser-induced surface topography are studied. We find that the femtosecond laser produce periodic ripples of the sub-micron level on silicon surface. At the same time, we realize the optimal conditions to produce these surface structures. When choosing NA=0.3, and v=2000μm/s or 3000μm/s, we find a series of periodic-structure ripples where the spacing is about 120nm and the width is about 450nm. The experimental results indicate that femtosecond laser treatment can produce line arrays on the sub-micron level, which is a positive factor for fabricating grating and other optical applications in nanoscales.
|
| Keywords:
79.20.Ds
42.62.Cf
61.80.Ba
|
|
|
Received: 03 December 2008
Published: 19 February 2009
|
|
| PACS: |
79.20.Ds
|
(Laser-beam impact phenomena)
|
| |
42.62.Cf
|
(Industrial applications)
|
| |
61.80.Ba
|
(Ultraviolet, visible, and infrared radiation effects (including laser radiation))
|
|
|
|
|
|
[1] Birnbaum M 1965 J. Appl. Phys. 36 3688
[2] Guosheng Z, Fauchet P M and Siegman A E 1982 Phys.Rev. B 26 5366
[3] Lu Y F, Choi W K, Aoyagi Y, Kinomura A and Fujii K 1996 J. Appl. Phys. 80 7052
[4] Wang J and Guo C 2005 Appl. Phys. Lett. 87251914
[5] Emmony D C, Howson R P and Willis L J 1973 Appl.Phys. Lett. 23 598
[6] Tosin P, Blatter A and L\"{uthy W 1995 J. Appl.Phys. 78 3797
[7] Aksenov V P 1984 SPIE Symp. Optika 473 294
[8] Bonse J, Baudach S, Kr\"{uger J, Kautek W and Lenzner M2002 Appl. Phys. A 74 19
[9] Wagner R, Gottmann J, Horn A and Kreutz E W 2006 Appl. Surf. Sci. 252 8576
[10] Wagner R, Gottmann J, Horn A and Kreutz E W 2004 Proc. SPIE 5662 168
[11] Ashkenasi D, Rosenfeld A, Varel H, W\"{ahmer M andCampbell E E B 1997 Appl. Surf. Sci. 120 65
[12] Costache F, Henyk M and Reif J 2003 Appl. Surf.Sci. 208/209 486
[13] Semerok A and Dutouquet C 2004 Thin Solid Films 453/454 501
[14] Streltsov A M, Ranka J K and Gaeta A L 1998 Opt.Lett. 23 798
[15] Sipe J E, Young J F, Preston J S and Van Driel H M 1983 Phys. Rev. B 27 1141
[16] Andreev A V, Nazarov M M, Prudnikov I R, Shkurinov A Pand Masselin P 2004 Phys. Rev. B 69 035403 |
|
Viewed |
|
|
|
Full text
|
|
|
|
|
Abstract
|
|
|
|
|
