Synthesis of Nano-Crystalline Diamond Film in Hot Filament
Chemical Vapour Deposition by Adding Ar

Chin. Phys. Lett.

2001, Vol. 18

Issue (2): 286-288 DOI:

Original Articles

Synthesis of Nano-Crystalline Diamond Film in Hot Filament Chemical Vapour Deposition by Adding Ar

ZHANG Yu-Feng;ZHANG Fan;GAO Qiao-Jun;YU Da-Peng;PENG Xiao-Fu;LIN Zeng-Dong

Department of Physics, Peking University, Beijing 100871 Beijing Institute of Powder Metallurgy, Beijing 100078

Cite this article:

ZHANG Yu-Feng, ZHANG Fan, GAO Qiao-Jun et al 2001 Chin. Phys. Lett. 18 286-288

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Abstract Nano-crystalline diamond films are successfully deposited on silicon substrates via the hot filament chemical vapour deposition process using a CH₄/H₂/Ar gas mixture. The as-grown films are analysed by using field emission scanning electron microscopy, micro-Raman spectroscopy and x-ray diffraction. These results show that the films consist of nano-diamond grains with sizes ranging from 10 to 100 nm, and argon is an important element in the formation of nano-crystalline diamonds.

Keywords: 81.15.Gh 68.55.-a 61.50.-f 61.16.Bg

Published: 01 February 2001

PACS:	81.15.Gh	(Chemical vapor deposition (including plasma-enhanced CVD, MOCVD, ALD, etc.))
	68.55.-a	(Thin film structure and morphology)
	61.50.-f	(Structure of bulk crystals)
	61.16.Bg

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https://cpl.iphy.ac.cn/ OR https://cpl.iphy.ac.cn/Y2001/V18/I2/0286

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	ZHANG Yu-Feng
	ZHANG Fan
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	PENG Xiao-Fu
	LIN Zeng-Dong

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