Chin. Phys. Lett.  2001, Vol. 18 Issue (2): 286-288    DOI:
Original Articles |
Synthesis of Nano-Crystalline Diamond Film in Hot Filament Chemical Vapour Deposition by Adding Ar
ZHANG Yu-Feng;ZHANG Fan;GAO Qiao-Jun;YU Da-Peng;PENG Xiao-Fu;LIN Zeng-Dong
Department of Physics, Peking University, Beijing 100871 Beijing Institute of Powder Metallurgy, Beijing 100078
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ZHANG Yu-Feng, ZHANG Fan, GAO Qiao-Jun et al  2001 Chin. Phys. Lett. 18 286-288
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Abstract Nano-crystalline diamond films are successfully deposited on silicon substrates via the hot filament chemical vapour deposition process using a CH4/H2/Ar gas mixture. The as-grown films are analysed by using field emission scanning electron microscopy, micro-Raman spectroscopy and x-ray diffraction. These results show that the films consist of nano-diamond grains with sizes ranging from 10 to 100 nm, and argon is an important element in the formation of nano-crystalline diamonds.
Keywords: 81.15.Gh      68.55.-a      61.50.-f      61.16.Bg     
Published: 01 February 2001
PACS:  81.15.Gh (Chemical vapor deposition (including plasma-enhanced CVD, MOCVD, ALD, etc.))  
  68.55.-a (Thin film structure and morphology)  
  61.50.-f (Structure of bulk crystals)  
  61.16.Bg  
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https://cpl.iphy.ac.cn/       OR      https://cpl.iphy.ac.cn/Y2001/V18/I2/0286
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ZHANG Yu-Feng
ZHANG Fan
GAO Qiao-Jun
YU Da-Peng
PENG Xiao-Fu
LIN Zeng-Dong
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