Field Emission from Amorphous Carbon Nitride Films Deposited on Silicon Tip Arrays

Chin. Phys. Lett.

2003, Vol. 20

Issue (6): 944-946 DOI:

Original Articles

Field Emission from Amorphous Carbon Nitride Films Deposited on Silicon Tip Arrays

LI Jun-Jie^1,2;ZHENG Wei-Tao¹;SUN Long²;BIAN Hai-Jiao¹;JIN Zeng-Sun¹;ZHAO Hai-Feng³;SONG-Hang³;MENG Song-He⁴;HE Xiao-Dong⁴;HAN Jie-Cai⁴

¹National Key Laboratory of Superhard Materials and Department of Materials Science, Jilin University, Changchun 130023 ²Department of Physics, School of Science and Engineering, Yanbian University, Yanji 133002 ³Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130021 ⁴Composite Research Center, Harbin Institute of Technology, Harbin 150006

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LI Jun-Jie, ZHENG Wei-Tao, SUN Long et al 2003 Chin. Phys. Lett. 20 944-946

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Abstract Amorphous carbon nitride films (a-CN_x) were deposited on silicon tip arrays by rf magnetron sputtering in pure nitrogen atmosphere. The field emission property of carbon nitride films on Si tips was compared with that of carbon nitride on silicon wafer. The results show that field emission property of carbon nitride films deposited on silicon tips can be improved significantly in contrast with that on wafer. It can be explained that field emission is sensitive to the local curvature and geometry, thus silicon tips can effectively promote field emission property of a-CN_x films. In addition, the films deposited on silicon tips have a smaller effective work function (F = 0.024 eV) of electron field emission than that on silicon wafer (F = 0.060 eV), which indicates a significant enhancement of the ability of electron field emission from a-CN_x films.

Keywords: 79.70.+q 68.55.-a 81.15.Cd

Published: 01 June 2003

PACS:	79.70.+q	(Field emission, ionization, evaporation, and desorption)
	68.55.-a	(Thin film structure and morphology)
	81.15.Cd	(Deposition by sputtering)

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https://cpl.iphy.ac.cn/ OR https://cpl.iphy.ac.cn/Y2003/V20/I6/0944

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	LI Jun-Jie
	ZHENG Wei-Tao
	SUN Long
	BIAN Hai-Jiao
	JIN Zeng-Sun
	ZHAO Hai-Feng
	SONG-Hang
	MENG Song-He
	HE Xiao-Dong
	HAN Jie-Cai

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