Cathodoluminescence of ZnO Films

Chin. Phys. Lett.

1998, Vol. 15

Issue (6): 457-459 DOI:

Original Articles

Cathodoluminescence of ZnO Films

FU Zhu-xi;GUO C hang-xin;LIN Bi-xia;LIAO Gui-hong

Department of Physics, University of Science and Technology of China, Hefei 230026

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FU Zhu-xi, GUO C hang-xin, LIN Bi-xia et al 1998 Chin. Phys. Lett. 15 457-459

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Abstract The cathodoluminescence of ZnO films deposited on Si substrates by reactive dc sputtering is investigated. Apart from the characteristic green emission band (522nm) of ZnO, an ultraviolet (392nm) band and a blue (430-460 nm) band have been observed. The x-ray diffraction and cathodoluminescent spectra reveal the dependences of the luminescence on the preparation conditions and crystallinity of the ZnO films.

Keywords: 78.60.Hk 78.66.Li 81.15.Cd

Published: 01 June 1998

PACS:	78.60.Hk	(Cathodoluminescence, ionoluminescence)
	78.66.Li	(Other semiconductors)
	81.15.Cd	(Deposition by sputtering)

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https://cpl.iphy.ac.cn/ OR https://cpl.iphy.ac.cn/Y1998/V15/I6/0457

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	FU Zhu-xi
	GUO C hang-xin
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