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Analysis and Verification of the Relationship between the Maximum Mass Sensitivity of Quartz Crystal Microbalance and Electrode Parameters |
| Wei Pan, Xian-He Huang**, Qiao Chen, Zhi-Chao Fan, Yuan Xu |
School of Automation Engineering, University of Electronic Science and Technology of China, Chengdu 611731
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| Cite this article: |
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Wei Pan, Xian-He Huang, Qiao Chen et al 2019 Chin. Phys. Lett. 36 070701 |
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Abstract We analyze the effect of electrode diameter and thickness on the mass sensitivity. Through the theoretical approximate calculation, we find that the mass sensitivity does not change monotonically with electrode diameter and there is a maximum point. The optimum electrode diameter corresponding to the maximum mass sensitivity varies with the electrode thickness. For a particular electrode diameter, a quartz crystal microbalance (QCM) with thick electrode has a higher mass sensitivity. A proper plating experiment using 35 QCMs with different electrode diameters and thicknesses verifies this finding. The present study further reveals how electrode size affects mass sensitivity and is helpful for QCM design.
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Received: 16 March 2019
Published: 20 June 2019
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| PACS: |
07.07.Mp
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(Transducers)
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07.75.+h
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(Mass spectrometers)
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43.25.Zx
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(Measurement methods and instrumentation for nonlinear acoustics)
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43.35.Ns
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(Acoustical properties of thin films)
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| Fund: Supported by the National Natural Science Foundation of China under Grant No 61871098. |
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