Silicon-on-Insulator-Based Broadband 1$\times$3 Adiabatic Splitter with Simultaneous Tapering of Velocity and Coupling
Yuan-Hao Gong, Zhi-Yong Li, Jin-Zhong Yu, Yu-De Yu**
State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083
Abstract ：We propose and experimentally demonstrate a broadband $1\times3$ adiabatic splitter based on the silicon-on-insulator technology, with simultaneous tapering of velocity and coupling. The designed structure becomes simulated transmission uniformity of three outputs better than 0.5 dB in a broadband of 250 nm, and a large simulated fabrication tolerance is obtained. A manufactured splitter whose parameters greatly diverge from the design acquires a measured result of the worst splitting ratio better than 1.5 dB as well as an excess loss lower than 0.8 dB in a large wavelength range of 80 nm. A post-simulation based on the tested splitter obtains a result that meets the actual transmission well.
收稿日期: 2016-05-06
出版日期: 2016-09-30
:
42.82.Cr
(Fabrication techniques; lithography, pattern transfer)
42.82.Ds
(Interconnects, including holographic interconnects)
42.82.Bq
(Design and performance testing of integrated-optical systems)
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2016, Vol. 33 
