Enhanced Second-Order Resonance Actuation and Frequency Response Modulation of Microcantilever by Dual Coplanar Counter Electrodes
FENG Zhao-Bin, LIU Duo**
State Key Laboratory of Crystal Materials, Shandong University, Jinan 250100
Abstract :We achieve enhanced actuation of the 2nd -order resonance of a microcantilever in a capacitive microcantilever structure featured by a dual coplanar counter electrodes configuration. A torque about the static point of the 2nd eigenmode is generated in this configuration and therefore enables effective actuation of the 2nd -order resonance. It is further confirmed that the torque has the effect of suppressing the 1st -order resonance. As a result, the frequency response curve of the microcantilever beam can be modulated. Our results suggest that electric actuation of any higher-order resonances of the microcantilever can be realized through a rational design of counter electrodes.
收稿日期: 2013-05-07
出版日期: 2013-11-21
:
07.07.Df
(Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing)
07.10.Pz
(Instruments for strain, force, and torque)
46.40.Ff
(Resonance, damping, and dynamic stability)
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