Enhanced Second-Order Resonance Actuation and Frequency Response Modulation of Microcantilever by Dual Coplanar Counter Electrodes
FENG Zhao-Bin, LIU Duo**
State Key Laboratory of Crystal Materials, Shandong University, Jinan 250100
Abstract ：We achieve enhanced actuation of the 2nd nd nd st
收稿日期: 2013-05-07
出版日期: 2013-11-21
:
07.07.Df
(Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing)
07.10.Pz
(Instruments for strain, force, and torque)
46.40.Ff
(Resonance, damping, and dynamic stability)
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2013, Vol. 30 
