High Performance Humidity Sensor Based on Electrospun Zr0.9Mg0.1O2?δ Nanofibers
SU Mei-Ying1,2, WANG Jing1**, YAO Peng-Jun1,3, DU Hai-Ying1,4
1School of Electronic Science and Technology, Dalian University of Technology, Dalian 116023 2Institute of Microelectronics of Chinese Academy, Sciences, Beijing 100029 3School of Educational Technology, Shenyang Normal University, Shenyang 110034 4Department of Electromechanical Engineering & Information, Dalian Nationalities University, Dalian 116600
Abstract：Zr0.9Mg0.1O2?δ nanofibers and ZrO2 nanofibers are synthesized using electrospinning and the calcination technique. The nanofibers are characterized using x-ray diffraction (XRD), a field emission scanning electron microscope (FE-SEM), and a Brunauer–Emmett–Teller (BET) surface analyzer. The humidity sensing properties of Zr0.9Mg0.1O2?δ nanofiber sensors are analyzed and compared with those of ZrO2 nanofiber sensors. The Zr0.9Mg0.1O2?δ nanofiber humidity sensors exhibit a broader humidity range of 11–97% relative humidity (RH), good linearity, small humidity hysteresis, and rapid response and recovery times. The complex impedance plots of the Zr0.9Mg0.1O2?δ sensor at different RHs are drawn, and the humidity sensing mechanism is discussed via an equivalent circuit.
. [J]. Chin. Phys. Lett., 2012, 29(11): 110701-110701.
SU Mei-Ying, WANG Jing, YAO Peng-Jun, DU Hai-Ying. High Performance Humidity Sensor Based on Electrospun Zr0.9Mg0.1O2?δ Nanofibers. Chin. Phys. Lett., 2012, 29(11): 110701-110701.
2012, Vol. 29 
