Measurement of Random Surface Parameters by Angle-Resolved In-plane Light Scattering with Constant Perpendicular Wave Vector
LI Hai-Xia1,2, LIU Chun-Xiang1, CHEN Xiao-Yi1, ZHANG Mei-Na1, CHENG Chuan-Fu1**
1College of Physics and Electronics, Shandong Normal University, Jinan 250014 2Department of Information Science and Technology, Shandong University of Politics Science and Law, Jinan 250014
Measurement of Random Surface Parameters by Angle-Resolved In-plane Light Scattering with Constant Perpendicular Wave Vector
LI Hai-Xia1,2, LIU Chun-Xiang1, CHEN Xiao-Yi1, ZHANG Mei-Na1, CHENG Chuan-Fu1**
1College of Physics and Electronics, Shandong Normal University, Jinan 250014 2Department of Information Science and Technology, Shandong University of Politics Science and Law, Jinan 250014
摘要We report the experimental method of angle-resolved in-plane light scattering for random surface parameter extraction. In the measurement of the scattered intensity profile at a certain angle of incidence, the perpendicular component of wave vector remains constant, which is realized by controlling the movement of the detector along a specified circular arc segment. We use the central δ−peak and the half-width of the diffused intensity profiles and their variations to obtain the roughness w, the lateral correlation length ξ and roughness exponent α of the rough surface sample. The measurement copes strictly with the theoretical analysis, and the inherent problem in previous in-plane light scattering experiment is overcome so that the changes of the perpendicular component of wave vector affect the half width a diffused intensity profile and the measurement accuracy.
Abstract：We report the experimental method of angle-resolved in-plane light scattering for random surface parameter extraction. In the measurement of the scattered intensity profile at a certain angle of incidence, the perpendicular component of wave vector remains constant, which is realized by controlling the movement of the detector along a specified circular arc segment. We use the central δ−peak and the half-width of the diffused intensity profiles and their variations to obtain the roughness w, the lateral correlation length ξ and roughness exponent α of the rough surface sample. The measurement copes strictly with the theoretical analysis, and the inherent problem in previous in-plane light scattering experiment is overcome so that the changes of the perpendicular component of wave vector affect the half width a diffused intensity profile and the measurement accuracy.
[1] van Rossum M C W and Nieuwenhuizen T M 1999 Rev. Mod. Phys. 71 313
[2] Liou K N and Takano Y 1994 Atmospheric Res. 31 271
[3] Gu Z H and Maradudin A A 1997 Proc. SPIE 3141 220
[4] Choi W 2008 Opt. Lett. 33 1596
[5] Sayles R S and Thomas T R 1978 Nature 271 431
[6] Berry M V and Blackwell T M 1979 J. Phys. A 12 781
[7] Jakeman E 1986 Fractals in Physics ed Pietronero L and Tossati E (Amsterdam: Elsevier)
[8] LIN N et al 1995 J. Mod. Opt. 42 225
[9] Sinha S K, Sirota E B, Garoff S and Stanley H B 1988 Phys. Rev. B 38 2297
[10] Yang H N, Yang H N, Zhao Y P, Wang G C and Lu T M 1996 Phys. Rev. Lett. 76 3774
[11] Yang H N, Wang G C and Lu T M 1993 Diffraction from Rough Surfaces and Dynamic Growth Fronts (Singapore: World Scientific)
[12] Zhao Y P, Wu I, Cheng C F, Block U, Wang G C and Lu T M 1998 J. Appl. Phys. 84 2571
[13] Cheng C F et al 2002 Phys. Rev. E 65 061104
[14] Yang H N, Lu T M and Wang G C 1993 Phys. Rev. B 47 3911
2011, Vol. 28 
