中国物理快报  2010, Vol. 27 Issue (1): 18502-018502    DOI: 10.1088/0256-307X/27/1/018502
  CROSS-DISCIPLINARY PHYSICS AND RELATED AREAS OF SCIENCE AND TECHNOLOGY 本期目录 | 过刊浏览 | 高级检索 |
Evaluating of Adhesion Property of ULSI Interconnect Films by the Surface Acoustic Waves
XIAO Xia, SHAN Xing-Meng, LIU Ya-Liang
School of Electronic and Information Engineering, Tianjin University, Tianjin 300072
Evaluating of Adhesion Property of ULSI Interconnect Films by the Surface Acoustic Waves
XIAO Xia, SHAN Xing-Meng, LIU Ya-Liang
School of Electronic and Information Engineering, Tianjin University, Tianjin 300072