2010, Vol. 27(1): 18502-018502 DOI: 10.1088/0256-307X/27/1/018502 | ||
Evaluating of Adhesion Property of ULSI Interconnect Films by the Surface Acoustic Waves | ||
XIAO Xia, SHAN Xing-Meng, LIU Ya-Liang | ||
School of Electronic and Information Engineering, Tianjin University, Tianjin 300072 | ||
收稿日期 2009-07-27 修回日期 1900-01-01 | ||
Supporting info | ||
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