中国物理快报  2005, Vol. 22 Issue (11): 2906-2909    
  Original Articles 本期目录 | 过刊浏览 | 高级检索 |
Probing Cu Diffusion Barrier Layers on Porous Low-Dielectric-Constant Films by Posireonium Annihilation Lifetime Spectroscopy
HU Yi-Fan1, SUN Jia-Ning2, Gidley D.W.2
1Department of Physics, Huazhong University of Science and Technology, Wuhan 430074 2Department of Physics, University of Michigan, Ann Arbor, MI 48109, USA
Probing Cu Diffusion Barrier Layers on Porous Low-Dielectric-Constant Films by Posireonium Annihilation Lifetime Spectroscopy
HU Yi-Fan1;SUN Jia-Ning2;Gidley D.W.2
1Department of Physics, Huazhong University of Science and Technology, Wuhan 430074 2Department of Physics, University of Michigan, Ann Arbor, MI 48109, USA