A MEMS-Based Piezoelectric Power Generator for Low Frequency Vibration Energy Harvesting
FANG Hua-Bin1, LIU Jing-Quan1, XU Zheng-Yi2, DONG Lu1, CHEN Di1, CAI Bing-Chu1, LIU Yue2
1Key Laboratory for Thin Film and Micro Fabrication of the Ministry of Education, National Key Laboratory of Micro/Nano Fabrication, Institute of Micro/Nano Science and Technology, Shanghai Jiao Tong University, Shanghai 200030
2ACS Sensors Lab, Honeywell Company, Shanghai 201203
A MEMS-Based Piezoelectric Power Generator for Low Frequency Vibration Energy Harvesting
1Key Laboratory for Thin Film and Micro Fabrication of the Ministry of Education, National Key Laboratory of Micro/Nano Fabrication, Institute of Micro/Nano Science and Technology, Shanghai Jiao Tong University, Shanghai 200030
2ACS Sensors Lab, Honeywell Company, Shanghai 201203
Abstract： A novel power generator has been achieved to convert vibration to electrical energy via the piezoelectric effect. The generator obtained by micro fabrication process mainly consists of silicon based frame and composite cantilever. The prototype tested at resonant vibration generates 1.15μW of effective power to a 20.4-kΩ resistance load. The potential of this work is to offer miniaturization solutions for power generators, and with the proposed method the ambient ubiquitous vibration can be harvested effectively as endless energy source to form an integrated self-powering system.
(Dielectric, ferroelectric, and piezoelectric devices)
引用本文:
FANG Hua-Bin;LIU Jing-Quan;XU Zheng-Yi;DONG Lu;CHEN Di;CAI Bing-Chu;LIU Yue. A MEMS-Based Piezoelectric Power Generator for Low Frequency Vibration Energy Harvesting[J]. 中国物理快报, 2006, 23(3): 732-734.
FANG Hua-Bin, LIU Jing-Quan, XU Zheng-Yi, DONG Lu, CHEN Di, CAI Bing-Chu, LIU Yue. A MEMS-Based Piezoelectric Power Generator for Low Frequency Vibration Energy Harvesting. Chin. Phys. Lett., 2006, 23(3): 732-734.
2006, Vol. 23 
