Abstract： Electrowetting-on-dielectric (EWOD) controls directly the wettability of liquids on the solid surface by applying an electric potential to the microelectrode array under the dielectric layer. A prototype of the EWOD droplet actuator is put forward, consisting of Si used as the substrate of the microelectrode array, Si3N4 film as the dielectric layer and fluorocarbon polymer (p-C:F) film deposited by plasma enhanced chemical vapour deposition (PECVD) as the hydrophobic layer. The p-C:F film was uniform and compact, and the contact angle of deionized water on the p-C:F film reached $110 °. The actuator successfully actuated deionized droplets surrounded in silicone oil at the voltage of 35V.
ZENG Xue-Feng;YUE Rui-Feng;WU Jian-Gang;DONG Liang;LIU Li-Tian. Actuation and Control of Droplets by Using Electrowetting-on-Dielectric[J]. 中国物理快报, 2004, 21(9): 1851-1854.
ZENG Xue-Feng, YUE Rui-Feng, WU Jian-Gang, DONG Liang, LIU Li-Tian. Actuation and Control of Droplets by Using Electrowetting-on-Dielectric. Chin. Phys. Lett., 2004, 21(9): 1851-1854.
2004, Vol. 21 
