Dynamics Behaviour of Nanoscale Electrostatic Actuators
LIN Wen-Hui, ZHAO Ya-Pu
State Key Laboratory of Nonlinear Mechanics, Institute of Mechanics, Chinese Academy of Sciences, Beijing 100080
Dynamics Behaviour of Nanoscale Electrostatic Actuators
LIN Wen-Hui;ZHAO Ya-Pu
State Key Laboratory of Nonlinear Mechanics, Institute of Mechanics, Chinese Academy of Sciences, Beijing 100080
关键词 ：
85.85.+j ,
02.30.Oz
Abstract ： The dynamics behaviour for nanoscale electrostatic actuators is studied. A two parameter mass-spring model is shown to exhibit a bifurcation from the case excluding an equilibrium point to the case including two equilibrium points as the geometrical dimensions of the device are altered. Stability analysis shows that one is a stable Hopf bifurcation point and the other is an unstable saddle point. In addition, we plot the diagram phases, which have periodical orbits around the Hopf point and a homoclinic orbit passing though the unstable saddle point.
Key words ：
85.85.+j
02.30.Oz
出版日期: 2003-11-01
:
85.85.+j
(Micro- and nano-electromechanical systems (MEMS/NEMS) and devices)
02.30.Oz
(Bifurcation theory)
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