Chin. Phys. Lett.  2018, Vol. 35 Issue (5): 050701    DOI: 10.1088/0256-307X/35/5/050701
Combining Cubic Spline Interpolation and Fast Fourier Transform to Extend Measuring Range of Reflectometry
Ju Cheng1,2, Jian Lu1**, Hong-Chao Zhang1, Feng Lei2**, Maryam Sardar1, Xin-Tian Bian2, Fen Zuo2, Zhong-Hua Shen1, Xiao-Wu Ni1, Jin Shi2
1School of Science, Nanjing University of Science and Technology, Nanjing 210094
2School of Physics and Electronic Electrical Engineering, Huaiyin Normal University, Huai'an 223001
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Ju Cheng, Jian Lu, Hong-Chao Zhang et al  2018 Chin. Phys. Lett. 35 050701
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Abstract The reflectometry is a common method used to measure the thickness of thin films. Using a conventional method, its measurable range is limited due to the low resolution of the current spectrometer embedded in the reflectometer. We present a simple method, using cubic spline interpolation to resample the spectrum with a high resolution, to extend the measurable transparent film thickness. A large measuring range up to 385 μm in optical thickness is achieved with the commonly used system. The numerical calculation and experimental results demonstrate that using the FFT method combined with cubic spline interpolation resampling in reflectrometry, a simple, easy-to-operate, economic measuring system can be achieved with high measuring accuracy and replicability.
Received: 26 December 2017      Published: 30 April 2018
PACS:  07.60.Rd (Visible and ultraviolet spectrometers)  
  06.20.Jr (Determination of fundamental constants)  
  42.30.Kq (Fourier optics)  
  07.05.Kf (Data analysis: algorithms and implementation; data management)  
Fund: Supported by the National Natural Science Foundation of China under Grant No 11604115, the Educational Commission of Jiangsu Province of China under Grant No 17KJA460004, and the Huaian Science and Technology Funds under Grant No HAC201701.
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Articles by authors
Ju Cheng
Jian Lu
Hong-Chao Zhang
Feng Lei
Maryam Sardar
Xin-Tian Bian
Fen Zuo
Zhong-Hua Shen
Xiao-Wu Ni
Jin Shi
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