Combining Cubic Spline Interpolation and Fast Fourier Transform to Extend Measuring Range of Reflectometry

doi:10.1088/0256-307X/35/5/050701

Chin. Phys. Lett.

2018, Vol. 35

Issue (5): 050701 DOI: 10.1088/0256-307X/35/5/050701

GENERAL

Combining Cubic Spline Interpolation and Fast Fourier Transform to Extend Measuring Range of Reflectometry

Ju Cheng^1,2, Jian Lu^1**, Hong-Chao Zhang¹, Feng Lei^2**, Maryam Sardar¹, Xin-Tian Bian², Fen Zuo², Zhong-Hua Shen¹, Xiao-Wu Ni¹, Jin Shi²

¹School of Science, Nanjing University of Science and Technology, Nanjing 210094
²School of Physics and Electronic Electrical Engineering, Huaiyin Normal University, Huai'an 223001

Cite this article:

Ju Cheng, Jian Lu, Hong-Chao Zhang et al 2018 Chin. Phys. Lett. 35 050701

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Abstract The reflectometry is a common method used to measure the thickness of thin films. Using a conventional method, its measurable range is limited due to the low resolution of the current spectrometer embedded in the reflectometer. We present a simple method, using cubic spline interpolation to resample the spectrum with a high resolution, to extend the measurable transparent film thickness. A large measuring range up to 385 μm in optical thickness is achieved with the commonly used system. The numerical calculation and experimental results demonstrate that using the FFT method combined with cubic spline interpolation resampling in reflectrometry, a simple, easy-to-operate, economic measuring system can be achieved with high measuring accuracy and replicability.

Received: 26 December 2017 Published: 30 April 2018

PACS:	07.60.Rd	(Visible and ultraviolet spectrometers)
	06.20.Jr	(Determination of fundamental constants)
	42.30.Kq	(Fourier optics)
	07.05.Kf	(Data analysis: algorithms and implementation; data management)

Fund: Supported by the National Natural Science Foundation of China under Grant No 11604115, the Educational Commission of Jiangsu Province of China under Grant No 17KJA460004, and the Huaian Science and Technology Funds under Grant No HAC201701.

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https://cpl.iphy.ac.cn/10.1088/0256-307X/35/5/050701 OR https://cpl.iphy.ac.cn/Y2018/V35/I5/050701

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	Ju Cheng
	Jian Lu
	Hong-Chao Zhang
	Feng Lei
	Maryam Sardar
	Xin-Tian Bian
	Fen Zuo
	Zhong-Hua Shen
	Xiao-Wu Ni
	Jin Shi

[1]	Masood H T et al 2017 Chin. Phys. B 26 067503
[2]	Qian S Y et al 2012 Chin. Phys. Lett. 29 104707
[3]	Kim K J et al 2006 Thin Solid Films 500 356
[4]	Kim K J et al 2012 Appl. Surf. Sci. 258 3552
[5]	Jaiswal J et al 2016 Appl. Opt. 55 8368
[6]	Xiu G C, Kui Y et al 2016 Acta Phys. Sin. 65 070703 (in Chinese)
[7]	Born M and Wolf E 1999 Principles of Optics (Cambridge: Cambridge University) 7th edn p 360
[8]	Cui J J and Gao S T 2014 Acta Phys. Sin. 63 060601 (in Chinese)
[9]	Kihara T and Kiyoshi Y 1990 Appl. Opt. 29 5069
[10]	Fanton J T et al 1993 J. Appl. Phys. 73 7035
[11]	Jang M J and Lu C F 2005 Opt. Commun. 253 2
[12]	Šantić B et al 2009 Appl. Opt. 48 4430
[13]	Takeda M and Kobayashi S 1982 J. Opt. Soc. Am. 72 156
[14]	Dorrer C et al 2000 Appl. Phys. B 70 S99
[15]	Quinten M et al 2015 Proc. SPIE 9526 95260R
[16]	Miller G F 2012 MS thesis (Texas State University)
[17]	Köysal O et al 2002 Opt. Commun. 205 1
[18]	Reinsch C H 1967 Number. Math. 10 177
[19]	Goldstein F Thin Film Measurement http://ftgsoftware.com /filmthk.htm

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