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Chin. Phys. Lett.  2015, Vol. 32 Issue (08): 086802    DOI: 10.1088/0256-307X/32/8/086802
CONDENSED MATTER: STRUCTURE, MECHANICAL AND THERMAL PROPERTIES |
Surface Acoustic Wave Humidity Sensors Based on (1120) ZnO Piezoelectric Films Sputtered on R-Sapphire Substrates
WANG Yan1,2**, ZHANG Shu-Yi1**, FAN Li1, SHUI Xiu-Ji 1, YANG Yue-Tao1
1Lab of Modern Acoustics, Institute of Acoustics, Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Nanjing 210093
2School of Electronic Science and Engineering, Nanjing University of Posts and Telecommunications, Nanjing 210046
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WANG Yan, ZHANG Shu-Yi, FAN Li et al  2015 Chin. Phys. Lett. 32 086802
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Abstract ZnO films on R-sapphire substrates are prepared and characterized by x-ray diffraction and scanning electron microscopy, which indicate that the thin films are well crystallized with (1120) texture. Love wave and Rayleigh wave are used for fabrications of humidity sensors, which are excited in [1100] and [0001] directions of the (1120) ZnO piezoelectric films, respectively. The experimental results show that both kinds of sensors have good humidity response and repeatability, and the performances of the Love wave sensors are better than those of the Rayleigh wave sensors at room temperature. Moreover, the theoretical calculations of the mass sensitivity of the sensors are also carried out and the calculated results are in good agreement with the experimental measurements.
Received: 14 May 2015      Published: 02 September 2015
PACS:  68.35.Iv (Acoustical properties)  
  68.55.-a (Thin film structure and morphology)  
  77.65.Dq (Acoustoelectric effects and surface acoustic waves (SAW) in piezoelectrics)  
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https://cpl.iphy.ac.cn/10.1088/0256-307X/32/8/086802       OR      https://cpl.iphy.ac.cn/Y2015/V32/I08/086802
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WANG Yan
ZHANG Shu-Yi
FAN Li
SHUI Xiu-Ji
YANG Yue-Tao
[1] Chen Z and Lu C 2005 Sens. Lett. 3 274
[2] Wang Z Y, Shi L Y, Wu F Q, Yuan S A, Zhao Y and Zhang M H 2011 Nanotechnology 22 275502
[3] Wu T T, Chen Y Y and Chou T H 2008 J. Phys. D: Appl. Phys. 41 085101
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[5] Xie J, Wang H, Lin Y H, Zhou Y and Wu Y P 2013 Sens. Actuators B 177 1083
[6] D'Amico A and Verona E 1989 Sens. Actuators 17 55
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[8] Yanagitani T, Nohara T, Matsukawa M, Watanabe Y and Otani T 2005 IEEE Trans. Ultrason. Ferroelectr. Freq. Control 52 2140
[9] Wang Y, Wasa K and Zhang S Y 2012 IEEE Trans. Ultrason. Ferroelectr. Freq. Control 59 1613
[10] Biswas P, Kundu S, Banerji P and Bhuni S 2013 Sens. Actuators B 178 331
[11] Mitsuyu T, Ono S and Wasa K 1980 J. Appl. Phys. 51 2464
[12] Wang Y, Zhang S Y, Fan L, shui X J, Zhang Z N and Wasa K 2013 IEEE Trans. Ultrason. Ferroelectr. Freq. Control 60 1213
[13] Wang Y, Zhang S Y, Zhou F M, Fan L, Yang Y T and Wang C 2011 Sens. Actuators B 158 97
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[16] Yang B H and Qian L R 2013 Acta Phys. Sin. 62 117701 (in Chinese)
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