Fabrication of Micro-Grooves in Silicon Carbide Using Femtosecond Laser Irradiation and Acid Etching

doi:10.1088/0256-307X/31/3/037901

Chin. Phys. Lett.

2014, Vol. 31

Issue (03): 037901 DOI: 10.1088/0256-307X/31/3/037901

CONDENSED MATTER: ELECTRONIC STRUCTURE, ELECTRICAL, MAGNETIC, AND OPTICAL PROPERTIES

Fabrication of Micro-Grooves in Silicon Carbide Using Femtosecond Laser Irradiation and Acid Etching

KHUAT Vanthanh^1,2, MA Yun-Can¹, SI Jin-Hai^1**, CHEN Tao¹, CHEN Feng¹, HOU Xun¹

¹Key Laboratory for Physical Electronics and Devices of the Ministry of Education and Shaanxi Key Lab of Information Photonic Technique, School of Electronics and information Engineering, Xi'an Jiaotong University, Xi'an 710049
²Le Quy Don Technical University, Hanoi 7EN-248, Vietnam

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KHUAT Vanthanh, MA Yun-Can, SI Jin-Hai et al 2014 Chin. Phys. Lett. 31 037901

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Abstract A simple method using an 800-nm femtosecond laser and chemical selective etching is developed for fabrication of high-aspect-ratio grooves in silicon carbide. Micro grooves with an aspect ratio of approximately 40 are obtained. The morphology and chemical compositions of the grooves are analyzed using a scanning electronic microscope equipped with an energy dispersive x-ray spectroscopy. The formation mechanism of SiC grooves is attributed to the chemical reactions of the laser induced structural changes with a mixed solution of hydrofluoric acid and nitric acid. In addition, the effects of laser irradiation parameters on the aspect ratio of the grooves are investigated.

Received: 16 October 2013 Published: 28 February 2014

PACS:	79.20.Eb	(Laser ablation)
	79.20.Ws	(Multiphoton absorption)
	81.05.Je	(Ceramics and refractories (including borides, carbides, hydrides, nitrides, oxides, and silicides))

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https://cpl.iphy.ac.cn/10.1088/0256-307X/31/3/037901 OR https://cpl.iphy.ac.cn/Y2014/V31/I03/037901

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	KHUAT Vanthanh
	MA Yun-Can
	SI Jin-Hai
	CHEN Tao
	CHEN Feng
	HOU Xun

[1] Young D J et al 2004 IEEE Sens. J. 4 464
[2] ?stling M et al 2004 Thin Solid Films 469 444
[3] Mehregany M and Zorman C A 1999 Thin Solid Films 355 518
[4] Mehregany M et al 1998 Proc. IEEE 86 1594
[5] Zorman C A, Rajgopal S, Fu X A, Jezeski R, Melzak J and Mehregany M 2002 Electrochem. Solid-State Lett. 5 G99
[6] Mehregany M et al 2000 Int. Mater. Rev. 45 85
[7] Arbab A et al 1993 Sens. Actuators B 15 19
[8] Morkoc H et al 1994 J. Appl. Phys. 76 1363
[9] Sarro P M 2000 Sens. Actuators A 82 210
[10] Xie K et al 1995 Appl. Phys. Lett. 67 368
[11] Chabert P et al 2001 Appl. Phys. Lett. 79 916
[12] Tanaka S et al 2001 J. Vac. Sci. Technol. B 19 2173
[13] Khan F A et al 1999 Appl. Phys. Lett. 75 2268
[14] Yih P H et al 1997 Phys. Status Solidi B 202 605
[15] Pecholt B et al 2011 J. Laser Appl. 23 012008
[16] Li C et al 2009 Opt. Commun. 282 78
[17] Farsari M et al 2005 J. Micromech. Microeng. 15 1786
[18] Xia X et al 2011 Chin. Phys. B 20 044208
[19] Li B J et al 2012 Acta Phys. Sin. 61 237901 (in Chinese)
[20] Jiang Y et al 2012 Chin. Phys. B 21 064219
[21] Dong Y and Molian P 2003 Appl. Phys. A 77 839
[22] Dong Y et al 2003 J. Micromech. Microeng. 13 680
[23] Amera M S et al 2005 Appl. Surf. Sci. 242 162
[24] Borowiec A and Haugen H K 2004 Appl. Phys. A 79 521
[25] Khan F A et al 2001 J. Electron. Mater. 30 212
[26] Kudrius T et al 2010 J. Phys. D 43 145501
[27] Steinert M et al 2007 J. Phys. Chem. C 111 2133
[28] Zhu J et al 2007 Nanotechnology 18 365603
[29] Gattass et al 2008 Nat. Photon. 2 219

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