Magnetic-Particle-Composite-Medium-Filled Stacked-Spiral Inductors for Radio-Frequency CMOS Applications

doi:10.1088/0256-307X/30/12/128401

Chin. Phys. Lett.

2013, Vol. 30

Issue (12): 128401 DOI: 10.1088/0256-307X/30/12/128401

CROSS-DISCIPLINARY PHYSICS AND RELATED AREAS OF SCIENCE AND TECHNOLOGY

Magnetic-Particle-Composite-Medium-Filled Stacked-Spiral Inductors for Radio-Frequency CMOS Applications

ZHAN Jing^1,2**, CAI Hua-Lin¹, CHEN Xiao¹, WANG Xin³, FANG Qiang³, YANG Yi^1**, REN Tian-Ling^1**, LIU Li-Tian¹, LI Xin-Xin², WANG Albert³, YANG Chen²

¹Institute of Microelectronics, and Tsinghua National Laboratory for Information Science and Technology, Tsinghua University, Beijing 100084
²Shanghai Institute of Microsystem and Information Technology, Shanghai 200050
³Department of Electrical Engineering, University of California, Riverside, CA 92521, USA

Cite this article:

ZHAN Jing, CAI Hua-Lin, CHEN Xiao et al 2013 Chin. Phys. Lett. 30 128401

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Abstract Magnetic-particle-composite-medium-filled stacked-spiral inductors for rf complementary metal oxide semiconductor (CMOS) applications in GHz are demonstrated. The new inductor features a nearly closed magnetic circuit loop, an optimized high-permeability and low-loss sub-1 μm magnetic particles' composite core, and a developed 0.18-μm CMOS-compatible device fabrication process. An equivalent circuit model with structural amplifying factors is proposed and modeled. The prototype of the 6-level stacked inductor with Co₂Z magnetic-particles-composite-medium filling increases the inductance L by 50%, and quality factor Q by 37% at frequencies as high as 1 GHz, with high inductance density as 825 nH/mm² and a reduced size area by 80% compared to the planar spiral inductor.

Received: 23 May 2013 Published: 13 December 2013

PACS:

84.32.-y

(Passive circuit components)

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https://cpl.iphy.ac.cn/10.1088/0256-307X/30/12/128401 OR https://cpl.iphy.ac.cn/Y2013/V30/I12/128401

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	ZHAN Jing
	CAI Hua-Lin
	CHEN Xiao
	WANG Xin
	FANG Qiang
	YANG Yi
	REN Tian-Ling
	LIU Li-Tian
	LI Xin-Xin
	WANG Albert
	YANG Chen

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