Ultrasonic Energy Transference Based on an MEMS ZnO Film Array

doi:10.1088/0256-307X/29/12/127701

Chin. Phys. Lett.

2012, Vol. 29

Issue (12): 127701 DOI: 10.1088/0256-307X/29/12/127701

CONDENSED MATTER: ELECTRONIC STRUCTURE, ELECTRICAL, MAGNETIC, AND OPTICAL PROPERTIES

Ultrasonic Energy Transference Based on an MEMS ZnO Film Array

WU Shao-Hua^1,2, ZHAO Zhan^1**, ZHAO Jun-Juan^1,2, GUO Li-Jun^1,2, DU Li-Dong¹, FANG Zhen¹, KONG De-Yi³, XIAO Li^1,2, GAO Zhong-Hua^1,2

¹State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190
²Graduate University of Chinese Academy of Sciences, Beijing 100049
³State Key Laboratory of Transducer Technology, Institute of Intelligent Machines, Chinese Academy of Sciences, Hefei 230031

Cite this article:

WU Shao-Hua, ZHAO Zhan, ZHAO Jun-Juan et al 2012 Chin. Phys. Lett. 29 127701

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Abstract An ultrasonic energy transference system with a ZnO square piezoelectric thin-film array (SPTFA) structure is presented. The design principle of the system is analyzed, and a device with the SPTFA structure is successfully fabricated based on MEMS processes. The characteristics of the energy transference system are investigated in detail. The experimental results reveal that the resonant frequency of the system is 13 MHz, the maximum voltage of the receiving end reaches 10.87 V when the amplitude of excitation voltage is 10 V, at that time the output power of system is 5.377 mW, and power density is 2.581 mW/cm². The light emitting diode is lit successfully by the system in a distance of 3 mm.

Received: 21 March 2012 Published: 04 March 2013

PACS:

77.65.-j

(Piezoelectricity and electromechanical effects)

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https://cpl.iphy.ac.cn/10.1088/0256-307X/29/12/127701 OR https://cpl.iphy.ac.cn/Y2012/V29/I12/127701

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Articles by authors
	WU Shao-Hua
	ZHAO Zhan
	ZHAO Jun-Juan
	GUO Li-Jun
	DU Li-Dong
	FANG Zhen
	KONG De-Yi
	XIAO Li
	GAO Zhong-Hua

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[11] Park K K et al 2011 Sens. Actuat. B 160 1120
[12] Pan M C et al 2011 Jpn. J. Appl. Phys. 50 07HD02
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[18] Richardson J J et al 2011 Appl. Phys. Express 4 126502

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