Chin. Phys. Lett.  2011, Vol. 28 Issue (8): 087403    DOI: 10.1088/0256-307X/28/8/087403
CONDENSED MATTER: ELECTRONIC STRUCTURE, ELECTRICAL, MAGNETIC, AND OPTICAL PROPERTIES |
Fabrication of High-Quality Niobium Superconducting Tunnel Junctions
XU Qin-Yin, CAO Chun-Hai, LI Meng-Yue, JIANG Yi, ZHA Shi-Tong, KANG Lin, XU Wei-Wei, CHEN Jian**, WU Pei-Heng
Research Institute of Superconductor Electronics (RISE), Nanjing University, Nanjing 210093
Cite this article:   
XU Qin-Yin, CAO Chun-Hai, LI Meng-Yue et al  2011 Chin. Phys. Lett. 28 087403
Download: PDF(1189KB)  
Export: BibTeX | EndNote | Reference Manager | ProCite | RefWorks
Abstract For high-quality superconducting tunnel junctions (STJs), it is necessary to reduce leakage current as much as possible. We describe the fabrication of niobium STJs using the selective niobium (Nb) etching process and various ways to minimize the leakage current. The experiment shows that the leakage current mainly comes from shorts in the tunnel barrier layer rather than those around the junction edges. Through systematic analysis of the thin film stress, surface morphology and modified junction structures, we fabricate high-quality Nb STJs with a gap voltage of 2.8 mV and a leakage current at 1 mV as low as 8.1% and 0.023% at 4.2 K and 0.3 K, respectively.
Keywords: 74.50.+r      85.25.Cp     
Received: 17 March 2011      Published: 28 July 2011
PACS:  74.50.+r (Tunneling phenomena; Josephson effects)  
  85.25.Cp (Josephson devices)  
TRENDMD:   
URL:  
https://cpl.iphy.ac.cn/10.1088/0256-307X/28/8/087403       OR      https://cpl.iphy.ac.cn/Y2011/V28/I8/087403
Service
E-mail this article
E-mail Alert
RSS
Articles by authors
XU Qin-Yin
CAO Chun-Hai
LI Meng-Yue
JIANG Yi
ZHA Shi-Tong
KANG Lin
XU Wei-Wei
CHEN Jian
WU Pei-Heng
[1] Gurvitch M, Washington M A and Huggins H A 1983 Appl. Phys. Lett. 42 472
[2] Huggins H A and Gurvitch M 1985 J. Appl. Phys. 57 2103
[3] Morohashi S, Shinoki F, Shoji A and Aoyagi M 1985 Appl. Phys. Lett. 46 1179
[4] Imamura T, Shiota T and Hasuo S 1992 IEEE Trans. Appl. Supercond. 2 1
[5] Meng X F, Zheng L Z, Wong A and Van Duzer T 2001 IEEE Trans. Appl. Supercond. 11 365
[6] Zmuidzinas J and Richards P L 2004 Proc. IEEE 92 1598
[7] Nakamura Y et al 1999 Nature 398 786
[8] Yu Y, Han S, Chu X, Chu S I and Wang Z 2002 Science 296 889
[9] Tucker J R and Feldman M J 1985 Rev. Mod. Phys. 57 1055
[10] Wu T et al 2006 Chin. Phys. Lett. 23 971
[11] Yu H F et al 2008 Chin. Phys. B 17 3083
[12] Wen X D and Yu Y 2008 Chin. Phys. Lett. 25 694
[13] Ariyoshi S et al 2009 Appl. Phys. Lett. 95 193504
[14] Li J et al 2007 Chin. Phys. Lett. 24 570
[15] Kroger H, Smith L N and Jillie D W 1981 Appl. Phys. Lett. 39 280
[16] Meng X F, Bhat A and Van Duzer T 1999 IEEE Trans. Appl. Supercond. 9 3208
[17] Muller K H 1987 J. Appl. Phys. 62 1796
[18] Joynson R E, Neugebauer C Aand Rairden J R 1967 J. Vac. Sci. Technol. 4 171
[19] Lehnert T, Grassl C and et al 1991 Supercond. Sci. Technol. 4 419
[20] Kohlstedt H, Gundlach K H and Schneider A 1991 IEEE Trans. Appl. Supercond. 27 3149
Related articles from Frontiers Journals
[1] GAO Gui-Long,SONG Fu-Quan,HUANG Shou-Sheng,WANG Yan-Wei,FAN Zhi-Qiang,YUAN Xian-Zhang,JIANG Nian-Quan**. Producing and Distinguishing χ-Type Four-Qubit States in Flux Qubits[J]. Chin. Phys. Lett., 2012, 29(4): 087403
[2] Hamidreza Emamipour, Jafar Emamipour. Zero-Bias Conductance versus Potential Strength of Interface in Ferromagnetic Superconductors[J]. Chin. Phys. Lett., 2012, 29(3): 087403
[3] CHEN Qing-Hu, **, LI Lei, LIU Tao, WANG Ke-Lin. The Spectrum in Qubit-Oscillator Systems in the Ultrastrong Coupling Regime[J]. Chin. Phys. Lett., 2012, 29(1): 087403
[4] PENG Lin**, LIU Yong-Sheng, CAI Chuan-Bing, ZHANG Jin-Cang . Influence of Magnetic Scattering and Interface Transparency on Superconductivity Based on a Ferromagnet/Superconductor Heterostructure[J]. Chin. Phys. Lett., 2011, 28(8): 087403
[5] LIAO Qing-Hong, FANG Guang-Yu, WANG Ji-Cheng, AHMAD Muhammad Ashfaq, LIU Shu-Tian** . Control of the Entanglement between Two Josephson Charge Qubits[J]. Chin. Phys. Lett., 2011, 28(6): 087403
[6] WANG Zheng**, FAN Bin, ZHAO Xin-Jie, YUE Hong-Wei, HE Ming, JI Lu, YAN Shao-Lin, FANG Lan, Klushin A. M. . Characteristics of Off-Chip Millimeter-Wave Radiation from Serial Josephson Junction Arrays[J]. Chin. Phys. Lett., 2011, 28(6): 087403
[7] TIAN Li-Jun, **, QIN Li-Guo, ZHANG Hong-Biao . Entanglement of Two-Superconducting-Qubit System Coupled with a Fixed Capacitor[J]. Chin. Phys. Lett., 2011, 28(5): 087403
[8] FAN Bin, WANG Zheng, YUE Hong-Wei, YAN Shao-Lin**, JI Lu, HE Ming, SONG Feng-Bin, FANG Lan, ZHAO Xin-Jie . Coupling of a Tl2Ba2CaCu2O8 Thin Film Intrinsic Josephson Junction and a Fabry–Perot Resonator[J]. Chin. Phys. Lett., 2011, 28(3): 087403
[9] XUE Peng . Quantum Memory via Wigner Crystals of Polar Molecules[J]. Chin. Phys. Lett., 2011, 28(12): 087403
[10] Minoru SUZUKI, Kenji HAMADA, Ryota TAKEMURA, Masayuki OHMAKI, Itsuhiro KAKEYA. Overdoped High Current Density Bi2-xPbxSr2CaCu2O8+δ Intrinsic Josephson Junction Mesas and Their Switching Current Distributions[J]. Chin. Phys. Lett., 2010, 27(8): 087403
[11] ZHENG Xiao-Hu, DONG Jun, LIU Yu-Wen, YANG Ming, CAO Zhuo-Liang. Unconventional Geometric Quantum Gate in Circuit QED[J]. Chin. Phys. Lett., 2010, 27(7): 087403
[12] YU Long-Bao, XUE Zheng-Yuan. Implementation of a Quantum Conditional Phase Gate for the Quantum Fourier Transform in Circuit QED[J]. Chin. Phys. Lett., 2010, 27(7): 087403
[13] LI Fei, PAN Chang-Ning, ZHANG Dong-Xia, TANG Li-Qiang. Chaotic Dynamics of a Josephson Junction with Nonlinear Damping[J]. Chin. Phys. Lett., 2010, 27(5): 087403
[14] FENG Zhi-Bo, YAN Run-Ying. Robust Quantum Computation with Superconducting Charge Qubits via Coherent Pulses[J]. Chin. Phys. Lett., 2010, 27(1): 087403
[15] ZHOU Tie-Ge, MAO Jing, LIU Ting-Shu, LAI Yue, YAN Shao-Lin. Phase Locking and Chaos in a Josephson Junction Array Shunted by a Common Resistance[J]. Chin. Phys. Lett., 2009, 26(7): 087403
Viewed
Full text


Abstract