CONDENSED MATTER: ELECTRONIC STRUCTURE, ELECTRICAL, MAGNETIC, AND OPTICAL PROPERTIES |
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Characteristics in AlN/AlGaN/GaN Multilayer-Structured High-Electron-Mobility Transistors |
HU Gui-Zhou, YANG Ling, YANG Li-Yuan, QUAN Si, JIANG Shou-Gao, MA Ji-Gang, MA Xiao-Hua, HAO Yue |
Key Laboratory of Wide Band-Gap Semiconductor Materials and Devices, Xidian University, Xi'an 710071 |
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Cite this article: |
HU Gui-Zhou, YANG Ling, YANG Li-Yuan et al 2010 Chin. Phys. Lett. 27 087302 |
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Abstract A nonvolatile memory device with nitrided Si nanocrystals embedded in a floating gate was fabricated. The uniform Si nanocrystals with high density (3×1011 cm-2) were deposited on ultra-thin tunnel oxide layer (~ 3 nm) and followed by a nitridation treatment in ammonia to form a thin silicon nitride layer on the surface of nanocrystals. A memory window of 2.4 V was obtained and it would be larger than 1.3 V after ten years from the extrapolated retention data. The results can be explained by the nitrogen passivation of the surface traps of Si nanocrystals, which slows the charge loss rate.
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Keywords:
73.61.Ey
07.07.Df
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Received: 12 November 2009
Published: 28 July 2010
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PACS: |
73.61.Ey
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(III-V semiconductors)
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07.07.Df
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(Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing)
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[1] Gelmont B, Kim K and Shur M 1993 J. Appl. Phys. 74 1818 [2] Mohammad S N, Salvador A and Morkoc H 1995 Proc. IEEE 83 1306 [3] Khan M A, Chen Q, Shur M S, Dermott T, Higgins J A, Burm J, Schaff W and Eastman L F 1996 Electron. Lett. 32 357 [4] Vetury R, Zhang N Q, Keller S and Mishra U K 2001 IEEE Trans. Electron Devices 48 560 [5] Gu W P, Duan H T, Ni J Y, Hao Y, Zhang J C, Feng Q and Ma X H 2009 Chin. Phys. B 18 1601 [6] Kordo353; P, Donoval D, Florovi269; M, Ková269; J and Gregu353;ová D 2008 Appl. Phys. Lett. 92 152113 [7] Meneghesso G, Pierobon R, Rampazzo F, Tamiazzo G, ZanoniE, Bernat J, Kordos P, Bade A F, Chini A and Verzellesi G 2005 IEEE Annual International Reliability Physics Symposium (San Jose, California 17-21 April 2005) p 415 [8] Lawrence Selvaraj S et al 2007 Appl. Phys. Lett. 90 173506 [9] Arulkumaran S, Ng G I and Liu Z H 2007 Appl. Phys. Lett. 90 173504
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