Chin. Phys. Lett.  2010, Vol. 27 Issue (8): 087302    DOI: 10.1088/0256-307X/27/8/087302
CONDENSED MATTER: ELECTRONIC STRUCTURE, ELECTRICAL, MAGNETIC, AND OPTICAL PROPERTIES |
Characteristics in AlN/AlGaN/GaN Multilayer-Structured High-Electron-Mobility Transistors

HU Gui-Zhou, YANG Ling, YANG Li-Yuan, QUAN Si, JIANG Shou-Gao, MA Ji-Gang, MA Xiao-Hua, HAO Yue

Key Laboratory of Wide Band-Gap Semiconductor Materials and Devices, Xidian University, Xi'an 710071
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HU Gui-Zhou, YANG Ling, YANG Li-Yuan et al  2010 Chin. Phys. Lett. 27 087302
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Abstract

A nonvolatile memory device with nitrided Si nanocrystals embedded in a floating gate was fabricated. The uniform Si nanocrystals with high density (3×1011 cm-2) were deposited on ultra-thin tunnel oxide layer (~ 3 nm) and followed by a nitridation treatment in ammonia to form a thin silicon nitride layer on the surface of nanocrystals. A memory window of 2.4 V was obtained and it would be larger than 1.3 V after ten years from the extrapolated retention data. The results can be explained by the nitrogen passivation of the surface traps of Si nanocrystals, which slows the charge loss rate.

Keywords: 73.61.Ey      07.07.Df     
Received: 12 November 2009      Published: 28 July 2010
PACS:  73.61.Ey (III-V semiconductors)  
  07.07.Df (Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing)  
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https://cpl.iphy.ac.cn/10.1088/0256-307X/27/8/087302       OR      https://cpl.iphy.ac.cn/Y2010/V27/I8/087302
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HU Gui-Zhou
YANG Ling
YANG Li-Yuan
QUAN Si
JIANG Shou-Gao
MA Ji-Gang
MA Xiao-Hua
HAO Yue
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