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Design, Fabrication and Test of a Soft X-Ray Even-Order Transmission Grating |
MA Jie, XIE Chang-Qing, LIU Ming, CHEN Bao-Qin, YE Tian-Chun |
Key Laboratory of Nano-Fabrication and Novel Devices Integrated Technology, Instititute of Microelectronics, Chinese Academy of Sciences, Beijing 100029 |
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Cite this article: |
MA Jie, XIE Chang-Qing, LIU Ming et al 2009 Chin. Phys. Lett. 26 090702 |
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Abstract Most transmission gratings in the x-ray region work with their first orders and dispersion is limited by the line density achievable with current fabrication technology. We present a novel design of a two-dimensional x-ray transmission grating. The grating works with higher dispersion using its second orders, and the influence from first and third orders can be suppressed. A grating according to the novel design is fabricated and its diffraction performance is tested in comparison with a traditional x-ray transmission grating with the same line density. The novel grating could be especially useful when high dispersion is desired while the fabrication of high-density gratings becomes more difficult.
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Keywords:
07.85.Fv
42.25.Fx
41.50.+h
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Received: 27 May 2009
Published: 28 August 2009
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PACS: |
07.85.Fv
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(X- and γ-ray sources, mirrors, gratings, and detectors)
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42.25.Fx
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(Diffraction and scattering)
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41.50.+h
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(X-ray beams and x-ray optics)
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