| FUNDAMENTAL AREAS OF PHENOMENOLOGY(INCLUDING APPLICATIONS) |
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Effect of Vacuum on the Laser-Induced Damage of Anti-Reflection Coatings |
LING Xiu-Lan, ZHAO Yuan-An, LI Da-Wei, ZHOU Ming, SHAO Jian-Da, FAN
Zheng-Xiu |
| 1Key Laboratory of Material Science and Technology for High Power Lasers, Shanghai Institute of Optics and Fine Mechanics, Shanghai 2018002Graduate School of Chinese Academy of Sciences, Beijing 1000493Department of Information Engineering, North University of China, Taiyuan 030051 |
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| Cite this article: |
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LING Xiu-Lan, ZHAO Yuan-An, LI Da-Wei et al 2009 Chin. Phys. Lett. 26 074203 |
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Abstract In the comparison of damage modifications, absorption measurement and energy dispersive x-ray analysis, the effect of vacuum on the laser-induced damage of anti-reflection coatings is analyzed. It is found that vacuum decreases the laser-induced damage threshold of the films. The low laser-induced damage threshold in vacuum environments as opposed to air environments is attributed to water absorption and the formation of the O/Si, O/Zr sub-stoichiometry in the course of laser irradiation.
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| Keywords:
42.79.Wc
81.70.Fy
81.70.Jb
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Received: 30 December 2008
Published: 02 July 2009
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| PACS: |
42.79.Wc
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(Optical coatings)
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81.70.Fy
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(Nondestructive testing: optical methods)
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81.70.Jb
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(Chemical composition analysis, chemical depth and dopant profiling)
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[5] Scurlock C 2004 SPIE 5647 82
[6] ISO 11254-1 2000 Determination of Laser-InducedDamage Threshold of Optical Surfaces Part 1:1-on-1 test |
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