Chin. Phys. Lett.  2009, Vol. 26 Issue (11): 117801    DOI: 10.1088/0256-307X/26/11/117801
CONDENSED MATTER: ELECTRONIC STRUCTURE, ELECTRICAL, MAGNETIC, AND OPTICAL PROPERTIES |
AlGaN-Based Deep-Ultraviolet Light Emitting Diodes Fabricated on AlN/sapphire Template
SANG Li-Wen1, QIN Zhi-Xin1, FANG Hao1, ZHANG Yan-Zhao1, LI Tao1, XU Zheng-Yu1, YANG Zhi-Jian1, SHEN Bo1, ZHANG Guo-Yi1, LI Shu-Ping2, YANG Wei-Huang2, CHEN Hang-Yang2, LIU Da-Yi2, KANG Jun-Yong2
1State Key Laboratory for Mesoscopic Physics, Department of Physics, Peking University, Beijing 1008712Department of Physics and Semiconductor Photonics Research Center, Xiamen University, Xiamen, 361005
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SANG Li-Wen, QIN Zhi-Xin, FANG Hao et al  2009 Chin. Phys. Lett. 26 117801
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Abstract We report on the growth and fabrication of deep ultraviolet (DUV) light emitting diodes (LEDs) on an AlN template which was grown on a pulsed atomic-layer epitaxial buffer layer. Threading dislocation densities in the AlN layer are greatly decreased with the introduction of this buffer layer. The crystalline quality of the AlGaN epilayer is further improved by using a low-temperature GaN interlayer between AlGaN and AlN. Electroluminescences of different DUV-LED devices at a wavelength of between 262 and 317nm are demonstrated. To improve the hole concentration of p-type AlGaN, Mg-doping with trimethylindium assistance approach is performed. It is found that the serial resistance of DUV-LED decreases and the performance of DUV-LED such as EL properties is improved.
Keywords: 78.55.Cr      85.60.Jb      81.15.Gh     
Received: 03 July 2009      Published: 30 October 2009
PACS:  78.55.Cr (III-V semiconductors)  
  85.60.Jb (Light-emitting devices)  
  81.15.Gh (Chemical vapor deposition (including plasma-enhanced CVD, MOCVD, ALD, etc.))  
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https://cpl.iphy.ac.cn/10.1088/0256-307X/26/11/117801       OR      https://cpl.iphy.ac.cn/Y2009/V26/I11/117801
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SANG Li-Wen
QIN Zhi-Xin
FANG Hao
ZHANG Yan-Zhao
LI Tao
XU Zheng-Yu
YANG Zhi-Jian
SHEN Bo
ZHANG Guo-Yi
LI Shu-Ping
YANG Wei-Huang
CHEN Hang-Yang
LIU Da-Yi
KANG Jun-Yong
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