Low-Frequency Relaxation Oscillations in Capacitive Discharge Processes

Chin. Phys. Lett.

2008, Vol. 25

Issue (2): 707-710 DOI:

Original Articles

Low-Frequency Relaxation Oscillations in Capacitive Discharge Processes

ZHOU Zhu-Wen¹;M. A. LIEBERMAN²;Sungjin KIM²;JI Shi-Yin¹;DENG Ming-Sen¹;SUN Guang-Yu ¹

¹Department of Physics, Guizhou Educational College, Guiyang 550003²Department of Electrical Engineering and Computer Sciences-1770, University of California, Berkeley CA 94720, USA

Cite this article:

ZHOU Zhu-Wen, M. A. LIEBERMAN, Sungjin KIM et al 2008 Chin. Phys. Lett. 25 707-710

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Abstract Low-frequency (2.72--3.70Hz) relaxation oscillations at 100mTorr at higher absorbed power were observed from time-varying optical emission of the main discharge chamber and the periphery. We interpret the low frequency
oscillations using an electromagnetic model of the slot impedance with parallel connection variational peripheral capacitance, coupled to a circuit analysis of the system including the matching network. The model results are in general agreement with the experimental observations, and indicate a variety of behaviours dependent on the matching conditions.

Keywords: 52.35.-g

Received: 21 October 2007 Published: 30 January 2008

PACS:

52.35.-g

(Waves, oscillations, and instabilities in plasmas and intense beams)

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https://cpl.iphy.ac.cn/ OR https://cpl.iphy.ac.cn/Y2008/V25/I2/0707

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	ZHOU Zhu-Wen
	M. A. LIEBERMAN
	Sungjin KIM
	JI Shi-Yin
	DENG Ming-Sen
	SUN Guang-Yu

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[5] Kim S J, Zhou Z W, Lieberman M A and Lichtenberg A J 2006 J. Appl. Phys. 100 103302
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