| CONDENSED MATTER: STRUCTURE, MECHANICAL AND THERMAL PROPERTIES |
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Physical and Chemical Properties of TiOxNy Prepared by Low-Temperature Oxidation of Ultrathin Metal Nitride Directly Deposited on SiO2 |
| HAN Yue-Ping, HAN Yan |
| National Key Laboratory for Electronic Measurement Technology, North University of China, Taiyuan 030051 |
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| Cite this article: |
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HAN Yue-Ping, HAN Yan 2009 Chin. Phys. Lett. 26 036402 |
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Abstract Physical and chemical properties of titanium oxynitride (TiOxNy) formed by low-temperature oxidation of titanium nitride (TiN) layer are investigated for advanced metal-oxide-semiconductor (MOS) gate dielectric application. TiOxNy exhibits polycrystalline properties after the standard thermal process for MOS device fabrication, showing the preferred orientation at [200]. Superior electrical properties of TiOxNy can be maintained before and after the annealing, probably due to the nitrogen incorporation in the oxide bulk and at the interface. Naturally formed transition layer between TiOxNy and SiO2 is also confirmed.
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| Keywords:
64.75.St
65.40.Gk
65.40.Gp
61.05.Cj
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Received: 11 November 2008
Published: 19 February 2009
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| PACS: |
64.75.St
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(Phase separation and segregation in thin films)
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65.40.gk
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(Electrochemical properties)
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65.40.gp
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(Surface energy)
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61.05.cj
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(X-ray absorption spectroscopy: EXAFS, NEXAFS, XANES, etc.)
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