FUNDAMENTAL AREAS OF PHENOMENOLOGY(INCLUDING APPLICATIONS) |
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High Efficiency Grating Coupler for Coupling between Single-Mode Fiber and SOI Waveguides |
ZHANG Can1,2, SUN Jing-Hua1, XIAO Xi2, SUN Wei-Min1, ZHANG Xiao-Jun1, CHU Tao2, YU Jin-Zhong 2, YU Yu-De2* |
1College of Science, Harbin Engineering University, Harbin 150001 2State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083
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Cite this article: |
ZHANG Can, SUN Jing-Hua, XIAO Xi et al 2013 Chin. Phys. Lett. 30 014207 |
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Abstract A high efficiency grating coupler between single?mode fiber and silicon-on-insulator waveguide is designed by a formula method. Over 78.5% coupling efficiency (>-1.05 dB) with 3 dB bandwidth about 50 nm for one grating coupler is obtained experimentally and this result is the highest one as far as we know. This grating coupler is CMOS compatible which needs only one etch-step and is designed for a standard SOI chip without any Bragg reflector or bottom reflector.
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Received: 25 October 2012
Published: 04 March 2013
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