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Improvement of Uniformity of Inductively Coupled Plasma with a one Spiral Antenna |
LI Lin-Sen;XU Xu;LIU Feng;ZHOU Qian-Hong;NIE Zong-Fu;LIANG Yi-Zi,
LIANG Rong-Qing |
| Institute of Modern Physics, Fudan University, Shanghai 200433 |
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| Cite this article: |
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LI Lin-Sen, XU Xu, LIU Feng et al 2008 Chin. Phys. Lett. 25 2144-2146 |
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Abstract Uniformity of inductively coupled plasma (ICP) is improved with a cone spiral antenna in our experiment. Performance of the ICP with a new type of antenna is experimentally investigated. The results indicate that the uniformity of plasma density in the radial direction is obviously improved as compared to the ICP with a planar spiral antenna. Performance of ICP is analysed with the experimental results.
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| Keywords:
52.35.Hr
52.50.Dg
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Received: 19 December 2007
Published: 31 May 2008
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| PACS: |
52.35.Hr
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(Electromagnetic waves (e.g., electron-cyclotron, Whistler, Bernstein, upper hybrid, lower hybrid))
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52.50.Dg
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(Plasma sources)
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