Heteroepitaxial Growth of Diamond Film on Cubic Boron Nitride
Substrate by Hot-Filament Chemical Vapour Deposition

Chin. Phys. Lett.

1995, Vol. 12

Issue (2): 120-122 DOI:

Original Articles

Heteroepitaxial Growth of Diamond Film on Cubic Boron Nitride Substrate by Hot-Filament Chemical Vapour Deposition

JIN Zengsun;LU Xianyi;ZOU Guangtian

State Key Laboratory of Superhard Material, Jilin University, Changchun 130023

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JIN Zengsun, LU Xianyi, ZOU Guangtian 1995 Chin. Phys. Lett. 12 120-122

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Abstract Diamond films have been grown on high pressure synthesized cubic boron nitride (c-BN) particles by hot-filament chemical vapor deposition method, and heteroepitaxial diamond films on the c-BN (100) facets with no-evident defects were obtained, but polycrystalline diamond films were formed only on the c-BN (111) facets.

Keywords: 81.15.Gh 68.55.Ce

Published: 01 February 1995

PACS:	81.15.Gh	(Chemical vapor deposition (including plasma-enhanced CVD, MOCVD, ALD, etc.))
	68.55.Ce

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https://cpl.iphy.ac.cn/ OR https://cpl.iphy.ac.cn/Y1995/V12/I2/0120

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