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Combined Use of Differential Scanning Calorimetry and Cross-Sectional Transmission Electron Microscopy for Characterization of Thin-Film Reactions |
| MA En |
| Massachusetts Institute of Technology, Cambridge MA 02139, and IBM T. J. Watson Reseach Center, Yorktown Heights, NY 10598, USA |
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| Cite this article: |
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MA En 1991 Chin. Phys. Lett. 8 400-403 |
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Abstract We demonstrate that the combined use of differential scanning calorimetry (DSC) and cross-sectional transmission electron microscopy (XTEM) is a powerful technique in the quantitative investigation of the nucleation and growth of metastable and equilibrium phases during thin-film interdiffusion reactions. The Various approaches and advantages of the DSC/XTEM technique in obtaining a variety of kinetic and thermodynamic data are discussed. Explosive reactions, as opposed to conventionally controlled reactions, may occur in thin films where the multilayer geometry is used.
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| Keywords:
68.35.Rh
61.16.Di
82.40.-g
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Published: 01 August 1991
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| PACS: |
68.35.Rh
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(Phase transitions and critical phenomena)
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61.16.Di
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82.40.-g
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(Chemical kinetics and reactions: special regimes and techniques)
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