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Fabrication of Compound Lattice by Holographic Lithography |
| ZHONG Yong-Chun;ZHU Shao-An;WANG He-Zhou |
| State Key Laboratory of Optoelectronic Materials and Technologies, Sun Yat-Sen University,Guangzhou 510275 |
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| Cite this article: |
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ZHONG Yong-Chun, ZHU Shao-An, WANG He-Zhou 2005 Chin. Phys. Lett. 22 369-372 |
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Abstract Some compound lattices in photonic crystals with large complete photonic band gaps, such as the diamond structure and the two-dimensional hexagonal compound structure, is desired for fabrication. A novel method for fabrication of compound lattices by holographic lithography is reported. The key point is phase modulation by photoelectrical control and multiple-exposure techniques. This technique introduces many advances: for instance, using the same coherent beams and without changing the position of the sample during multiple-exposure.
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| Keywords:
42.70.Qs
42.40.My
42.40.Jv
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Published: 01 February 2005
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