Chin. Phys. Lett.  2004, Vol. 21 Issue (9): 1825-1827    DOI:
Original Articles |
GaN Growth with Low-Temperature GaN Buffer Layers Directly on Si(111) by Hydride Vapour Phase Epitaxy
YU Hui-Qiang;CHEN Lin;ZHANG Rong;XIU Xiang-Qian;XIE Zi-Li;YE Yu-Da;GU Shu-Lin;SHEN Bo;SHI Yi;ZHENG You-Dou
Jiangsu Provincial Key Laboratory of Photonic and Electronic Materials Science and Technology and Department of Physics, Nanjing University, Nanjing210093
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YU Hui-Qiang, CHEN Lin, ZHANG Rong et al  2004 Chin. Phys. Lett. 21 1825-1827
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Abstract GaN films are grown on Si(111) with low-temperature GaN (LT-GaN) layers as buffer layers by hydride vapour phase epitaxy (HVPE). The deposition temperature of the LT-GaN layers is changed from 400 to 900°C. When the LT-GaN layer is deposited at 600°C, GaN films show only c-oriented GaN (0002) and have the band edge emission at 365nm with no yellow luminescence bands. The results indicate that the LT-GaN layer can effectively block the unexpected Si etching by reactive gas during the GaN growth. However, the surface roughness of these GaN films grown on Si(111) is larger than that of GaN films on c-plane sapphire.
Keywords: 81.05.Ea      81.15.Gh      68.55.Jk     
Published: 01 September 2004
PACS:  81.05.Ea (III-V semiconductors)  
  81.15.Gh (Chemical vapor deposition (including plasma-enhanced CVD, MOCVD, ALD, etc.))  
  68.55.Jk  
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https://cpl.iphy.ac.cn/       OR      https://cpl.iphy.ac.cn/Y2004/V21/I9/01825
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YU Hui-Qiang
CHEN Lin
ZHANG Rong
XIU Xiang-Qian
XIE Zi-Li
YE Yu-Da
GU Shu-Lin
SHEN Bo
SHI Yi
ZHENG You-Dou
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