| Original Articles |
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Unit-Cell by Unit-Cell Epitaxial Growth of SrTiO3 and BaTiO3 Thin Films by Laser Molecular Beam Epitaxy |
| YANG Guo-zhen1,2,3;LÜ Hui-bin1,2;WANG Hui-sheng1,2,3;CUI Da-fu1,2,3;YANG Hai-qing2;WANG Hua2;ZHOU Yue-liang1,2,3;CHEN Zheng-hao1,2,3 |
| 1Laboratory of Optical Physics, 2Institute of Physics,
3Centre for Condensed Matter Physics, Chinese Academy of Sciences, Beijing 100080
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| Cite this article: |
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YANG Guo-zhen, LÜ, Hui-bin et al 1997 Chin. Phys. Lett. 14 478-480 |
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Abstract Atomically regulated unit-cell by unit-cell homoepitaxial SrTiO3 and heteroepitaxial BaTiO3 films were fabricated on SrTiO3(100) substrates by laser molecular beam epitaxy. The fine streak patterns and more than 1000 cycles undamping intensity oscillation were obtained by in situ reflection high-energy electron diffraction with precisely controlled intermittence between each unit-cell layer. The surface morphology of the films was examined by atomic force microscopy. The root-mean-square surface roughness of the films is about 0.1 nm.
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| Keywords:
81.15.Fg
68.55.Jk
77.84.-s
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Published: 01 June 1997
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| PACS: |
81.15.Fg
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(Pulsed laser ablation deposition)
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68.55.Jk
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77.84.-s
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(Dielectric, piezoelectric, ferroelectric, and antiferroelectric materials)
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