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A High Revolution Speed Noncontact Ultrasonic Motor Driven by a Non-Symmetrical Electrode |
YANG Bin;LIU Jing-Quan;CHEN Di;CAI Bing-Chu |
National Key Laboratory of Nano/Micro Fabrication Technology, Key Laboratory for Thin Films and Microfabrication of the Ministry of Education, Institute of Micro and Nano Science and Technology, Shanghai
Jiaotong University, Shanghai 200030 |
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Cite this article: |
YANG Bin, LIU Jing-Quan, CHEN Di et al 2005 Chin. Phys. Lett. 22 2598-2600 |
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Abstract A noncontact ultrasonic motor based on a non-symmetrical electrode is proposed. This motor has the advantages of using a simple driving electrode and having a high revolution speed. The revolution speed of its three-blade rotor can reach 5100rpm under a driving voltage of 20V. A method operated easily is proposed to measure the output torque.
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Keywords:
43.38.Fx
85.50.-n
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Published: 01 October 2005
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PACS: |
43.38.Fx
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(Piezoelectric and ferroelectric transducers)
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85.50.-n
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(Dielectric, ferroelectric, and piezoelectric devices)
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